integrated modeling of chemical mechanical planarization for sub-micron ic fabrication:: from particle scale to feature, die and wafer scales (in English)
luo, jianfeng
integrated modeling of chemical mechanical planarization for sub-micron ic fabrication:: from particle scale to feature, die and wafer scales (in English)
Luo, Jianfeng (Author) · springer · Physical Book
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luo, jianfeng
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