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Semiconductor Strain Metrology: Principles and Applications (in English)
Terence K. S. Wong
(Author)
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Bentham Science Publishers
· Paperback
Semiconductor Strain Metrology: Principles and Applications (in English) - S. Wong, Terence K.
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Synopsis "Semiconductor Strain Metrology: Principles and Applications (in English)"
This book surveys the major and newly developed techniques for semiconductor strain metrology. Semiconductor strain metrology has emerged in recent years as a topic of great interest to researchers involved in thin film and nanoscale device characterization. This book employs a tutorial approach to explain the principles and applications of each technique specifically tailored for graduate students and postdoctoral researchers. Selected topics include optical, electron beam, ion beam and synchrotron x-ray techniques. Unlike earlier references, this book specifically discusses strain metrology as applied to semiconductor devices with both depth and focus.
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All books in our catalog are Original.
The book is written in English.
The binding of this edition is Paperback.
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