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portada Silicon Anodization as a Structuring Technique: Literature Review, Modeling and Experiments (in English)
Type
Physical Book
Year
2017
Language
English
Pages
348
Format
Paperback
ISBN13
9783658192372
Edition No.
1

Silicon Anodization as a Structuring Technique: Literature Review, Modeling and Experiments (in English)

Alexey Ivanov (Author) · Springer Vieweg · Paperback

Silicon Anodization as a Structuring Technique: Literature Review, Modeling and Experiments (in English) - Alexey Ivanov

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Synopsis "Silicon Anodization as a Structuring Technique: Literature Review, Modeling and Experiments (in English)"

Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed. ​

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The book is written in English.
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