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portada the physics of submicron lithography (in English)
Type
Physical Book
Author
Language
English
Pages
510
ISBN
0306435780
ISBN13
9780306435782

the physics of submicron lithography (in English)

Valiev (Author) · springer publishing map · Physical Book

the physics of submicron lithography (in English) - valiev

Physical Book

$ 208.41

$ 219.99

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  • Condition: New
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Synopsis "the physics of submicron lithography (in English)"

this monograph details the physics behind the methods of generating submicron forms for electron beam, ion beam, optical, and x-ray lithography. topics are discussed at the level of analytical theory, allowing a study of scientific issues in the field without frequent reference to a general physics text.

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