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ion sources (in English)
Huashun Zhang
(Author)
·
Jianrong Zhang
(Illustrated by)
·
Springer
· Paperback
ion sources (in English) - Zhang, Jianrong ; Zhang, Huashun
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Synopsis "ion sources (in English)"
This book is the most comprehensive book on ion sources as part of ion implantation technology, a newly established basic technology for microelectronic device processing. It appeals to physicists, engineers and advanced students active in ion implantation and ion beam physics.
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All books in our catalog are Original.
The book is written in English.
The binding of this edition is Paperback.
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