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portada process modeling of chemical mechanical planarization
Type
Physical Book
Pages
144
ISBN
3639001664
ISBN13
9783639001662

process modeling of chemical mechanical planarization

Jihong Choi (Author) · vdm verlag dr. muller aktiengesells · Physical Book

process modeling of chemical mechanical planarization - jihong choi

Physical Book

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Synopsis "process modeling of chemical mechanical planarization"

chemical mechanical planarization (cmp) is one of the key enabling technologies for modern ic fabrication. however, mainly due to the high complexities coming from various interactions among mechanical reactions and chemical reactions, its fundamental ...

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