Name: ultraclean surface processing of silicon wafers: secrects of vlsi manufacturing (in English)
Price: 312.62 USD
Availability: InStock
Author: Hattori, Takeshi ; Hattori, T. ; Heusler, S.
ISBN: 9783642082726

portada ultraclean surface processing of silicon wafers: secrects of vlsi manufacturing (in English)

Type

Physical Book

Translated by

Illustrated by

Publisher

Author

Hattori, Takeshi ; Hattori, T. ; Heusler, S.

Year

2010

Language

Inglés

Pages

616

Format

Paperback

Dimensions

22.9 x 15.2 x 3.6 cm

Weight

0.93 kg.

ISBN

3642082726

ISBN13

9783642082726

Synopsis "ultraclean surface processing of silicon wafers: secrects of vlsi manufacturing (in English)"

This book summarizes the knowledge and experience of the successful Japanese semiconductor companies. For the first time the secrets of processing of semiconductor surfaces for device production are disclosed. All the people and companies involved in manufacturing of silicon-based semiconductor devices should have this book.

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ultraclean surface processing of silicon wafers: secrects of vlsi manufacturing (in English) - Hattori, Takeshi ; Hattori, T. ; Heusler, S.

Synopsis "ultraclean surface processing of silicon wafers: secrects of vlsi manufacturing (in English)"

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